Automatable production of shippable bilayer chips by pin tool deposition for an ion channel measurement platform
نویسندگان
چکیده
منابع مشابه
Integrated electrodes on a silicon based ion channel measurement platform.
We demonstrate the microfabrication of a low-noise silicon based device with integrated silver/silver chloride electrodes used for the measurement of single ion channel proteins. An aperture of 150 microm diameter was etched in a silicon substrate using a deep silicon reactive ion etcher and passivated with 30 nm of polytetrafluoroethylene via chemical vapor deposition. The average recorded noi...
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ژورنال
عنوان ژورنال: Biotechnology Journal
سال: 2010
ISSN: 1860-6768
DOI: 10.1002/biot.200900297